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2020-04-18 Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences Introduced PHI AES

Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences Introduced PHI AES

18-April-2020

 

Recently, installation and commissioning of PHI 710 Auger NanoProbe has been completed at Nano-X of Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Science. This is the second large-scale scientific instrument purchased by Nano-X from ULVAC-PHI, Inc. after PHI XPS. As an important surface analysis equipment, PHI 710 Auger NanoProbe will be connected with Nano-X's ultra-high vacuum interconnection pipeline, further improving Nano-X's existing surface analysis equipment system (XPS, TOF-SIMS, SEM, AFM, STM, etc.).  It will help in promoting the development of research in the fields of catalysis, semiconductors, microelectronics and metallurgy, etc.

 

 

 

AES Functioned Introduction

Auger Electron Spectroscopy (AES) is a surface analysis method that uses electron beam to ionize and excite the inner layer electrons from atoms, then measuring the energy of the auger electron emitted during relaxation to investigate the surface composition and chemical characteristics from samples. AES is not only surface sensitive, but also has very high spatial resolution in nano meter level, therefore it has been widely used in scientific researches such as semi-conductor, micro-electronics and metallurgy.

 

 

The main features of PHI 710 Auger NanoProbe include SEM imaging, semi quantitative/chemical analysis of element composition, one/two dimensional element distribution, depth profiling and EBSD analysis. This instrument is equipped with a thermal emission electron gun, which has a small and robust spot size, SEM imaging resolution ≤3nm, AES imaging resolution ≤8nm; uses a CMA coaxial analyzer, capable of collecting Auger electrons from all angles, therefore it does not limited by the shape or the angle of the sample; the energy resolution 0.5%~ 0.1% is continuously adjustable, and can achieve high sensitivity and high transmission rate; uses Ar ion gun to achieve sample surface sputter cleaning, charge neutralization and depth profiling; And uses electron backscatter diffraction detector (EBSD), which can provide the analysis of lattice structure and orientation.

 

 

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Introduction of Nano-X

Nano-X is the world's first large-scale scientific device in the field of nanotechnology that integrates material growth, device processing, testing and analysis under construction in accordance with national major scientific and technological infrastructure standards. Nano-X connects the various instruments through ultra-high vacuum pipelines. It solves the pollution problems of dust, surface oxidation and adsorption that are difficult to solve in the traditional ultra-clean room mode. On the other hand, it provides an achievable platform for the innovation of microscopic atomic scale new materials and devices and the innovative thinking mode based on atomic order and controllability.  Nano-X is composed of a material preparation platform with multiple comprehensive functions, equipment technology platform and test analysis platform. Nano-X is an irreplaceable advanced method and comprehensive research platform in the research of many disciplines such as materials science, environmental science, physics, chemistry and information science. It is also an important means of research and development of advanced industrial technologies, such as microelectronics and new materials.

 

 

Introduction of PHI

Physical Electronics, Inc. formerly known as Perkin Elmer, is a professional surface analysis instrument department and was acquired by Japan ULVAC, Inc. in 2003 and established ULVAC-PHI, Inc.  ULVAC-PHI, as the world's most professional manufacturer of surface analysis instruments, has more than 60 years of research and development and production history, focusing on the development and production of surface analysis instruments.  Their products include XPS, AES, ToF-SIMS and D-SIMS.  PHI CHINA is committed to provide users with advanced technology and high-quality services, and promote the application and development of surface analysis technology together with everyone.