PHI Quantera II Scanning XPS Microprobe



PHI Quantera II Scanning XPS Microprobe is the next generation of PHI’s highly successful product line of scanning XPS microprobe.  The Quantera II features of: a patented micro-focused scanning x-ray source, patented dual beam charge neutralization technology, a floating column ion gun for XPS sputter depth profiling, a large travel five axis precision sample stage and flexible robotic sample handling, and a fully automated internet ready instrument platform.  The Quantera-II increases the performance and productivity of these revolutionary technologies, providing the highest performance XPS system available to meet your current and future XPS needs.



PHI Quantera II Scanning XPS Microprobe



User Friendly

Whether you are analyzing a thin polymer sheet, a large plastic lens, a steel razor blade, or electrically isolated solder bumps; the instrument set-up is the same.  Point and click at an optical image to select the analysis areas.  Then start the analysis with the dual beam neutralizer and the auto-Z functions activated to provide automatic sample alignment and charge neutralization.  There is no individual sample tuning, no concerns over sample composition and size, and no worries about walking away from the instrument and letting it automatically collect data from all your samples.


Fully Automated Unattended Analysis by Worry-Free XPS Quantera II


Thin Film Analysis

Quantera II not only provides good depth profiling analysis performance to the inorganic thin film sample, but also has the superior depth profiling performance on organic thin film samples by using the C60 ion gun.  Figure 3(a) is showing the use of floating-type Ar ion gun to perform a sputter depth profile on a Solder ball and 3(b) is an organic thin-film depth profile using the C60 ion gun.

(a) (b)  

(a) 2 keV sputter depth profile of the surface species on a solder ball used for semiconductor packaging.

(b) 10 keV C60 depth profile of a 50/50 rapamycin and PLGA film showing segregation of the rapamycin to the surface of the coating.


Scanning XPS Microprobe

PHI’s patented scanning x-ray source provides a scanning microprobe environment for performing micro-area XPS analysis. An electronically raster scanned micro-focused electron beam strikes an aluminum anode creating a point source of aluminum x-rays. The ellipsoidal shaped monochromator delivers a scannable focused beam of monochromatic aluminum x-rays to the sample surface. When the electron beam is scanned on the aluminum anode, the x-ray beam is scanned on the sample surface. The diameter of the x-ray beam can be adjusted from less than 7.5 μm to 400 μm in diameter.


(a) Illustration of PHI’s patented scanning x-ray.

(b) X-ray beam induced secondary electron image of an MRS-3 magnification standard shows the ability of Quantera II to resolve features as small as 6 μm in diameter.


Micro-Area Spectroscopy

No contaminants were visible with an optical microscope on the surface of this transparent polymer film.  A secondary electron image immediately revealed the presence of unexpected localized contaminants on the polymers surface. Micro-area spectra obtained with a 20 μm diameter x-ray beam identified a fluorocarbon contaminant in a few minutes.


Contamination analysis with Quantera II. (a) Secondary electron image.  (b) Survey Spectra. (c) Carbon 1s spectra

(d) Elemental maps showing the smaller features in the SE image do not contain fluorine.  (e) Micro-area spectrum from the smaller features, with 7.5 μm diameter x-ray beam, identifies the presence of a second contaminant that contains Zn.



  • X-ray microprobe with ≤ 7.5 μm spatial resolution
  • High sensitivity electrostatic detection optics
  • Dual beam charge neutralization
  • Robotic sample handling
  • Samples up to 100 mm diameter and 25 mm thick
  • Two internal sample parking stations
  • High performance floating column ion gun
  • High speed snapshot depth profiling mode
  • Quantitative chemical state mapping
  • Automated angle dependent profiles
  • PHI MultiPak data reduction software


Optional accessories

  • Sample Positioning Station (SPS)
  • Hot/Cold sample stage
  • Cold sample introduction apparatus
  • Sample transfer chamber to external test stations
  • C60 sputter cleaning and depth profiling apparatus
  • Ar2500 GCIB sputter gun



  • Chemistry: Paints, polymer, catalysts.
  • Materials: Metal, thin films, nanomaterials.
  • Electronics: Semiconductor, magnetic storage media, micro-electronics, display technology.
  • Biomedicine: biomedical devices.


Contact CoreTech Marketing & Service team now.


For more details, please visit our Brochure or Application Notes pages.

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