PHI X-tool Automated XPS Microprobe



The PHI X-tool is the newest member of PHI’s suite of XPS instruments that also includes the PHI Quantera II and PHI VersaProbe III. The X-tool is designed to make XPS instrumentation accessible to a larger audience. An intuitive touch screen user interface, automatic sample loading, automatic analysis, and automatic report generation removes the requirement to be a surface analysis expert to perform XPS measurements.



Various Sample Viewing

X-tool Multiple image types are available for viewing the sample and defining the location of the analysis areas. One can use the image that provides the best capability for viewing the sample feature of interest.



Easy settings of specific measurement properties

Based on PHI’s patented scanning XPS microprobe technology and the newest touch panel operation interface, the PHI X-tool makes it possible for it's users to perform routine large area (up to 1.4mm) down to some specific small micro-area analysis.



High speed mapping analysis

Scanning X-ray source and high sensitive detector of X-tool allows high speed analysis by the detector unscan mode. Using the PHI MultiPak data interpretation software, chemical mapping with Linear Least Square Fitting (LLS) is also available. These figures are chemical mapping examples of organic materials contamination on the organic device samples.



Most advanced unique hardware

The PHI X-tool can set the analysis area from 20um to 1.4mm by the unique micro-focused X-ray source (patented). Fully-automated charge neutralization which equalizes a surface potential of insulated samples by dual beam of low-energy electron and argon ion are employed (patented). High speed while low damage ion sputtering is also available, by using high performance floating argon ion gun.





  • Micro-Electronics
  • Polymer
  • Tribology
  • Magnetic
  • Display Industries
  • Graphene
  • Catalysis
  • Energy related
  • Glass
  • Metal
  • Ceramic
  • Semi-conductors
  • Bio-Medical


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For more details, please visit our Brochure or Application Notes pages.

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