PHI nanoTOF 3



The nanoTOF 3 is PHI's Latest Generation of TOF-SIMS, having a Modern Ergonomic Package, Smaller Footprint, and Advanced Features.

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Key Technology

  • Primary Ion Gun for High-Precision Measurements
  • Triple Focusing Electrostatic Analyzer for Complex Sample Geometries
  • Automated Multi-sample Measurement in TOF-SIMS
  • Unique Ion Beam Technology
  • Molecular Structure Analysis based on Parallel Imaging MS/MS
  • Reliable Remoto Access for Measurements and Diagnostics, Even Away from Instrument
  • A Wide Selection of Options


Primary Ion Gun for High-Precision Measurements

Advanced Ion Beam Technology Achieves High Spatial Resolution

PHI nanoTOF 3 offers TOF-SIMS analysis with a high spatial resolution of 500 nm in high mass resolution mode and 50 nm in high spatial resolution mode.

The combination of a high brightness ion source, a high precision pulse mechanism and a high resolution analyzer ensures low noise, high sensitivity and high mass resolution measurements.

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Triple Focusing Electrostatic Analyzer for Complex Sample Geometries

TRIFT Analyzer for a Wide Range of Sample Geometries, Wide Bandpass Energy, and Wide Acquisition Angle

Secondary ions are emitted from the surface of the sample at different energies and angles. As a result, even secondary ions with exactly the same mass will have different flight times in the analyzer. This effect is particularly noticeable for samples with height differences or uneven surfaces. This not only leads to low mass resolution, but also has a significant effect on the shape of the spectrum and the background.

The Triple Focusing Electrostatic Analyzer (TRIFT) is able to compensate for differences in flight time caused by differences in energy and emission angle simultaneously. This is a key feature of the TRIFT analyzer, which simultaneously achieves high mass resolution and high detection sensitivity, as well as imaging with reduced shadows.

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Automated Multi-sample Measurement in TOF-SIMS

Automated Multi-sample Measurements with the Queue Editor

The Queue Editor allows users to easily create and edit all measurement recipes for spectral, image, and depth profile measurements.
Recipes include information on measurement conditions as well as measurement locations, enabling automated multi-sample, multi-point analysis based on the recipe.

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Automated Sample Transport Mechanism and Parking Position as Standard

The instrument is equipped with an automatic sample transfer mechanism that has been proven in more than 300 XPS Q-Series units. Sample sizes of up to 100 mm × 100 mm are possible, and the analysis chamber has a built-in parking position as standard.
Combined with the Queue Editor, the system allows continuous automated measurement of large numbers of samples.

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Unique Ion Beam Technology

New Pulsed Argon Ion Gun for Complete Turnkey Charge Neutralization

The pulsed low-velocity electrons and argon ions can easily neutralize charge regardless of the type and shape of the insulated sample and the polarity of the captured ions.

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Standard Ion Gun featuring FIB Function

The PHI nanoTOF 3 adds a FIB cross-sectioning function to the liquid metal ion gun. This allows small area cross-sectioning and TOF-SIMS analysis to be performed with a single ion gun. The entire process of cross-sectioning to analysis can be performed quickly and easily by computer operation. FIB cutting can also be performed while cooling the sample with liquid nitrogen.

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Molecular Structure Analysis based on Parallel Imaging MS/MS

Simultaneous Acquisition of MS1 and MS2 Data

By combining a tandem mass spectrometer (MS2) with a conventional TOF-SIMS analyzer (MS1), MS1 and MS2 data can be acquired simultaneously in the same measurement field with high sensitivity and speed.

The MS1 spectrum can be complex due to the large number of mass peaks generated by all components and fragments. Conversely, the MS2 spectrum, which is extracted and segmented by the precursor selector, has a much simpler spectral pattern. This provides information about the molecular structure, such as terminal groups, linear chains, double bonds, and enables specific molecular structure imaging.

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Reliable Remote Access for Measurements and Diagnostics, Even Away from the Instrument

Remote Access Function Allows the Instrument to be Controlled Remotely

The PHI nanoTOF 3 allows you to access the instrument via your company's local area network or the internet. Once the sample holder is mounted in the introduction chamber, functions such as transferring the sample into the analysis chamber, sample holder exchange with the parking position, setting of the measurement conditions (including all options), and data acquisition can all be performed remotely. Diagnostics of the instrument hardware and electronics can also be accessed remotely.

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Wide Selection of Options

  • Parallel imaging MS/MS
  • Ar gas cluster ion beam gun
  • Ar/O2 gas gun
  • Cs ion gun
  • C60 ion gun
  • Hot/Cold sample stage module
  • Transfer vessel
  • Inert gas glove box
  • Specimen holder for observing curved surfaces
  • Oxygen flood module
  • Focused ion beam (FIB) gun
  • FIB Software
  • Off-line data reduction software
  • Static SIMS Library


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For more details, please visit our Brochure or Application Notes pages.

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